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Modeling and test result of closed-loop MEMS accelerometer with wide dynamic range
Authors:Zhang  Feng  Jin  Xiangliang  Wang  Longsheng
Affiliation:1.School of Physics and Optoelectronics, Xiangtan University, Xiangtan, 411105, China
;2.Hunan Engineering Laboratory for Microelectronics, Optoelectronics and System on a Chip, Xiangtan, China
;
Abstract:Microsystem Technologies - MEMS technology has been applied in many fields including deep oil exploration and seismic detection areas, of which poor performance has limited its development until...
Keywords:
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