Modeling and test result of closed-loop MEMS accelerometer with wide dynamic range |
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Authors: | Zhang Feng Jin Xiangliang Wang Longsheng |
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Affiliation: | 1.School of Physics and Optoelectronics, Xiangtan University, Xiangtan, 411105, China ;2.Hunan Engineering Laboratory for Microelectronics, Optoelectronics and System on a Chip, Xiangtan, China ; |
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Abstract: | Microsystem Technologies - MEMS technology has been applied in many fields including deep oil exploration and seismic detection areas, of which poor performance has limited its development until... |
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