| 金刚石膜内晶粒尺寸和取向对其热导率的影响 |
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| 引用本文： | 顾长志 金曾孙. 金刚石膜内晶粒尺寸和取向对其热导率的影响[J]. 高技术通讯, 1997, 7(9): 20-22 |
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| 作者姓名： | 顾长志 金曾孙 |
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| 作者单位： | 吉林大学超硬材料国家重点实验室!长春，130023(顾长志，金曾孙，吕宪义，邹广田)，中国科技大学物理系!合肥，230026(张纪法，方容川) |
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| 摘 要： | 研究了金刚石膜内晶粒尺寸和取向程度对金刚石膜热导率的影响。通过对衬底表面进行不同研磨时间的处理和适当的工艺条件，采用灯丝热解化学气相沉积（ＨＦＣＶＤ）的方法在单晶硅衬底上形成了具有不同晶粒尺寸和不同程度（１００）晶面取向的金刚石膜，并研究了其热导率。结果表明，由大晶粒和较高程度（１００）晶面取向的晶粒构成的金刚石膜具有热导率特性。
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| 关 键 词： | 金刚石薄膜 热导率 晶粒尺寸 超硬材料 |
The Effects of Grain Size and Orientation on Thermal Conductivity of Diamond Film |
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| Gu Changzhi, Jin Zengsun, Lu Xianyi, Zou Guangtian,,Zhang Jifa, Fang Rongchun. The Effects of Grain Size and Orientation on Thermal Conductivity of Diamond Film[J]. High Technology Letters, 1997, 7(9): 20-22 |
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| Authors: | Gu Changzhi Jin Zengsun Lu Xianyi Zou Guangtian Zhang Jifa Fang Rongchun |
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| Abstract: | The effects of grain size and orientation on thermal conductivity of diamond film are studied in tills paper. Diamond films with differenct grain sizes and orientations have been synthesized by HFCVD method under different polishing time to the silicon substrate and suitable technique conditions. The results show that high thermal conductivity can be acquired for diamond films with large-grain and (100)-orientation. |
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| Keywords: | Diamond film Thermal conductivity Grain size Orientation |
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