尘埃粒子计数器的检测和校准现状

尘埃粒子计数器是用来评价洁净环境洁净度等级的重要仪器,近年来,尘埃粒子计数器的量值溯源一直是国内外计量机构的研究重点,目前被广泛认可的尘埃粒子计数器的溯源方法有两种:一是采用参加全国比对的尘埃粒子计数器与待检尘埃粒子计数器进行比对;另一种是通过凝结核粒子计数器溯源至气溶胶静电计,最终溯源至计量基准电流之上。本文将综述尘埃粒子计数器的检测和校准方法以及存在问题。

The Detection and Calibration Status of Airborne Particle Counter

Airborne particle counter is an important instrument used to evaluate the cleanliness level of clean environment.In recent years,the quantity traceability of airborne particle counter has always been the research focus of domestic and foreign measurement institutions.At present,there are two widely recognized methods for the traceability of airborne particle counter.One method is to compare the standard airborne particle counter that have participated in national comparison with the airborne particle counter to be calibrated,the other method is traceable to the aerosol electrometer through the condensation particle counter,and finally to the current that is one of measurement reference.In this paper,the detection and calibration methods of airborne particle counter and the existing problems are reviewed.