磨粒尺寸和基体硬度对固结磨料抛光YAG晶体的影响

钇铝石榴石(YAG)是一种应用广泛的硬脆难加工材料，其抛光过程工艺复杂、效率低。固结磨料抛光技术具有平坦化能力优、对工件形貌选择性高、磨料利用率高等优点。试验采用固结磨料抛光YAG晶体，研究固结磨料垫的基体硬度和金刚石磨粒尺寸对YAG晶体的材料去除率和表面质量的影响。结果表明:当基体硬度适中为Ⅱ、金刚石磨粒尺寸3～5 μm时，固结磨料抛光YAG晶体效果最优，其材料去除率为255 nm/min，表面粗糙度S_a值为1.79 nm。 

Effect of abrasive size and matrix hardness on fixed abrasive polishing of YAG crystal

Yttrium aluminum garnet (YAG) is a kind of hard-brittle and difficult-to-machine material with wide application. Its polishing process is complicated and inefficient. Fixed abrasive polishing technology has the advantages of excellent planarization ability, high selectivity for workpiece surface morphology, and high abrasive utilization. The effect of matrix hardness and diamond particle size of fixed abrasive pad on material removal rate and surface quality was investigated in fixed abrasive polishing of YAG crystal. The results show that when the hardness of the matrix is moderate to Ⅱ and the diamond abrasive size is 3 to 5 μm, the effect of fixed abrasive polishing of YAG crystal is the best. Under these conditions, material removal rate is 255 nm/min and surface roughness S_a is 1.79 nm in fixed abrasive polishing of YAG crystal.