| 激光荧光扫描光谱仪 |
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| 引用本文： | 董占民,苏哲,凌勇,韩立,陈皓明.激光荧光扫描光谱仪[J].仪器仪表学报,2001,22(1):62-64. |
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| 作者姓名： | 董占民 苏哲 凌勇 韩立 陈皓明 |
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| 作者单位： | 清华大学 物理系 |
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| 基金项目： | 国家“863”资助项目。 |
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| 摘 要： | 本文介绍了一种智能化激光荧光扫描光谱仪，可对大尺寸光致荧光样品进行扫描分析，从而获得需求的整体信息，进一步以发光二极管（LED）外延片为例，介绍仪器进行外延片在线无损检测的应用。该仪器可声速对LED外延片进行在线检测，给出相关参数。实现智能化检测。
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| 关 键 词： | 荧光光谱仪 扫描检测 LED外延片 CCD 激光扫描 |
| 修稿时间： | 1999年9月1日 |
The Scanning Laser Fluorescence Spectrometer |
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| Dong Zhanmin,SU Zhe,Ling Yong,Han Li,CHEN Haoming.The Scanning Laser Fluorescence Spectrometer[J].Chinese Journal of Scientific Instrument,2001,22(1):62-64. |
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| Authors: | Dong Zhanmin SU Zhe Ling Yong Han Li CHEN Haoming |
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| Abstract: | A new intelligent laser-induced fluorescence spectrometer was developed.Using the instrument,the large size semiconductor sample could be scanned spot by spot and the whole information about the fluorescence spectrum of sample was acquired immediately.All of these measurements were nondestructive.As an example,this instrument was used to detect the fluorescence property of eptiaxial layer of LED chip.The luminescent fluorescence images of 256×256 dots in two-inch chip can be acquired in the instrument. |
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| Keywords: | Fluorescence spectrometer Scanning analysis LED epitaxial CCD |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
