| 微器件装配系统总体方案研究 |
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| 引用本文： | 郑巍.微器件装配系统总体方案研究[J].光学精密工程,1998,6(4):60-64. |
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| 作者姓名： | 郑巍 |
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| 作者单位： | 清华大学精密仪器与机械学系 |
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| 摘 要： | 微器件装配技术是微机械的关键技术之一,本文从微器件装配系统的特性和功能出发,提出了一套微装配系统设计方案,并对系统各个组成部分进行分析,介绍了系统实现的方法。
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| 关 键 词： | 微器件 微装配 操作手 |
| 收稿时间： | 1998-03-16 |
A manipulator system for assemblying micro elements |
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| ZHENG Wei,XU YU Xian,LI Qing Xiang.A manipulator system for assemblying micro elements[J].Optics and Precision Engineering,1998,6(4):60-64. |
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| Authors: | ZHENG Wei XU YU Xian LI Qing Xiang |
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| Affiliation: | Dept of Precision Instrument and Mechanics, Tsinghua University, Beijing 100084 |
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| Abstract: | Microassembly is one of the key factors for micro electro mechanical systems.In this paper,a manipulator system for assemblying micro elements which is based on the properties and requirments of microassembly technology is presented.Design features of each components of this system are described and the methods to achieve these features are analysed. |
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| Keywords: | Micro element Microassembly Micromanipulator |
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