Microanalyses on the RuO<sub><nobr>2</nobr></sub> Particle–Glass Matrix Interface in Thick-Film Resistors with Piezoresistive Effects期刊界 All Journals 搜尽天下杂志传播学术成果专业期刊搜索期刊信息化学术搜索

Microanalyses on the RuO₂ Particle–Glass Matrix Interface in Thick-Film Resistors with Piezoresistive Effects

Authors:	Masashi Totokawa Syuichi Yamashita Kenji Morikawa Yoshihito Mitsuoka Toshihiko Tani Hiroaki Makino

Affiliation:	Denso Corporation, Kariya, Aichi 448-8661, Japan; Toyota Technological Institute, Nagoya 468-8511, Japan; Denso Corporation, Kariya, Aichi 448-8661, Japan; Toyota Technological Institute, Nagoya 468-8511, Japan; Toyota Central R&D Labs Inc., Nagakute, Aichi 480-1192, Japan; Toyota Central R&D Labs Inc., Nagakute, Aichi 480-1192, Japan

Abstract:	The piezoresistive mechanisms of composite thick films based on RuO₂ particles and both calcium-borosilicate and bismuth-borosilicate glass matrices were investigated by chemical and electrical microanalyses. The resistor based on bismuth-borosilicate glass showed higher sensitivity than that based on calcium-borosilicate glass. It was confirmed that the diffusion of ruthenium into glass affects the binding state of RuO₂ at the interface of the glass. Furthermore, an intermediate resistive layer is detected around the RuO₂ particle. These results suggest that the piezoresistive effect is related to a change in the electrical conductivity of the interfacial reaction layer caused by the diffusion of ruthenium into glass.

Keywords: