碱金属氧化物对低介电封接玻璃结构与性能的影响研究

玻璃由于优异的电学性能在电子封接领域的应用越来越广泛。本文以硼铝硅酸盐玻璃为基础玻璃体系,采用高温熔融法制备了低介电封接玻璃。通过拉曼光谱、热膨胀系数测定仪、密度计、弯曲梁低温测试仪、精密阻抗分析仪等对样品性能进行表征,研究了碱金属氧化物对低介电玻璃的结构与性能的影响。研究结果表明:碱金属氧化物R₂O总量保持不变,随着Li₂O取代量的增加,玻璃结构中[BO₃]含量先降低后增加,同时[AlO₄]增加、[AlO₆]降低;玻璃的热膨胀系数先降低后升高,密度变化趋势与之相反,且均在LN-3(Na₂O与Li₂O质量比为1.0:1.0)组出现极值;特征温度先升高后降低,最后Na₂O被完全取代后呈现再次升高的趋势;玻璃介电常数和介电损耗先降低后升高,且混合碱金属玻璃的介电常数和介电损耗均低于单一碱金属玻璃。

Effects of Alkali Metal Oxides on Structure and Properties of Sealing Glass with Low-Dielectric Constant

Glass is widely used in the field of electronic sealing due to its excellent electrical properties. The low dielectric sealing glass was prepared by high temperature melting method under aluminoborosilicate glass. The properties of the samples were characterized by Raman spectroscopy, thermal expansion coefficient tester, densitometer, bending beam low temperature tester and precision impedance analyzer. The effect of alkali metal oxides on the structure and properties of low dielectric glass was studied. The result shows that when the total content of R₂O remains unchanged, with the increase of Li₂O content, the content of [BO₃] in the glass structure decreases first and then increases, the content of [AlO₄] increases and the content of [AlO₆] decreases. The thermal expansion coefficient of glass decreases first and then increases, and the trend of density change is opposite to the thermal expansion coefficient. All of the above variables have extreme values in the LN-3 (the mass ratio of Na₂O and Li₂O is 1.0:1.0) group. The characteristic temperature of glass increases first and then decreases, and finally increases again when Na₂O is completely replaced. The dielectric constant and dielectric loss of glass decrease first and then increase, and the dielectric constant and dielectric loss of the glass containing mixed alkali metals are lower than that of the glass containing single alkali metal.