| 硅的电化学自致停腐蚀研究 |
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| 引用本文： | 李国正,郑玉祥.硅的电化学自致停腐蚀研究[J].微电子学,1995,25(3):44-46. |
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| 作者姓名： | 李国正 郑玉祥 |
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| 作者单位： | 西安交通大学电子工程系 |
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| 摘 要： | 本文对硅的电化学自致停腐蚀的原理作了简要分析，利用自制装置实现了硅电化学自致停腐蚀，成功制备出符合光波导要求的ＳＯＩ片。
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| 关 键 词： | 硅膜腐蚀 电化学腐蚀 硅 |
A Study on Electrochemical Self-Etch-Stop Etching of Silicon |
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| Li Guozheng,Zheng Yuxiang and Liu Enke.A Study on Electrochemical Self-Etch-Stop Etching of Silicon[J].Microelectronics,1995,25(3):44-46. |
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| Authors: | Li Guozheng Zheng Yuxiang and Liu Enke |
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| Abstract: | The mechanism of electrochemical self-etch-stop etching of silicon is analyzed in the paper.Electrochemical self-etch-stop of Si has been achieved by using a device made by ourselves and SOI wafers suitable for optical waveguides have been successfully prepared using this tech- nique. |
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| Keywords: | Silicon film etching Electrochemical etching Semiconductor process |
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