非接触电感式角位移传感器的设计与校准

本文设计了一种非接触电感式角位移传感器，该传感器由定子和转子组成，其中转子由扇形铜箔获得，定子包含一组激励线圈，一组接收线圈以及后续处理电路。当给激励线圈通入交变电流时，相邻两个接收线圈产生的感应电动势大小相等，方向相反，此时感应电压为0,当转子在接收线圈上方转动时，转子中产生的涡流会导致相邻两个接收线圈感应电压产生不同的变化，经过理论与仿真分析，验证了随着转子的转动，接收线圈中感应电压的幅值呈现正余弦变化。本文编写算法对正余弦信号进行识别与校准，以定位精度为0.000 3°的高精度时栅转台为基准对样机进行测试，结果表明校准完成后，在0°～360°范围内该传感器误差为0.1°,满足实际生产需求，验证了该方案的可行性。

Design and calibration of the non-contact inductive angular displacement sensor

In this article, a non-contact inductive angular displacement sensor is designed, which consists of a stator and a rotor. Therotor is obtained from the sector-shaped copper foil. The stator contains a set of excitation coils, a set of receiving coils and subsequentprocessing circuits. When an alternating current is applied to the excitation coil, the induced electromotive force generated by the twoadjacent receiving coils is equal in magnitude and opposite in direction. Meanwhile, the induced voltage is 0. When the rotor rotatesabove the receiving coil, the eddy current generated in the rotor will cause and the induced voltages of two adjacent receiving coils havedifferent changes. Through theoretical and simulation analysis, the amplitude of the induced voltages in the receiving coils changes insine and cosine with the rotor rotation. The algorithm is applied to identify and calibrate the sine and cosine signals, and the prototype istested with a high-precision time grid turntable with a positioning accuracy of 0. 000 3° as a reference. Results show that, after thecalibration, the sensor error is 0. 1° within the range of 0° ~ 360°. It could meet actual production requirements, and the feasibility of theprogram is verified.