用于二元光学器件制作的激光直写系统

通过双远心成像光路，激光直写（LDW）系统SVG—LDW 04把液晶空间光调制器（LCD-SLM）上的光斑直接成像在光刻胶板上，得到高质量的光斑图形。放置在SLM的共轭面上的CCD成像调焦装置能够实时地在监控像面质量。控制SLM的输入图形、曝光量（刻蚀深度）及系统的运行方式，LDW系统能够制作不同特性的二元衍射光学元件。给出了典型的（2台阶、4台阶）位相衍射器件制作的实验结果。

Laser Direct Writing System of Fabricating Binary Optical Elements

The laser direct writing(LDW) system SVGLDW 04 with a projection optical system and a spatial light modulator(LCD-SLM) can expose a reduction pattern directly on a photoresist plate.A CCD placed on the conjugation position of LCD-SLM can monitor the imaging quality from the surface of the photoresist plate.According to the different applications the LDW system can fabricate the binary optical elements with various diffraction properties by controlling the exposure times(engraving depth) and the motion mode of the system.The results with two-level phase and four-level phase structure elements have been given in the paper.