锑化铟红外探测器的微透镜阵列设计及试验

台面型锑化铟红外焦平面探测器的制作工艺简单，量子效率高，但是填充因子较低且会随着像元尺寸的减小而进一步降低。减小台面腐蚀深度可以提高探测器的填充因子，但会增大串音。介绍了一种新型微透镜阵列的设计与制备方法，以提高锑化铟红外探测器的填充因子并减小串音。与现有的热回流微透镜阵列相比，该微透镜阵列的填充率、表面粗糙度以及尺寸均匀性能得到了较好的兼顾，可直接在锑化铟红外探测器表面制作，工艺简单。结果显示，探测器的串音降低26%,光响应提高22%。

Design and Experiment of Microlens Array for InSb Infrared Detectors

The mesa-type InSb infrared focal plane array (IRFPA) detector typically has a simple fabrication process and high quantum efficiency. However, its filling factor is low, and it will further decrease with the reduction of the pixel size. Reducing the corrosion depth of the mesa can improve the fill factor of the detector, but it will increase the crosstalk. A novel design and preparation method for microlens arrays is introduced to improve the filling factor of InSb infrared detectors and reduce the crosstalk. Compared with the existing reflow microlens arrays, the filling rate, surface roughness, and size uniformity of this microlens array are well balanced, and it can be directly fabricated on the surface of InSb infrared detectors with a simple process. The results show that the crosstalk of the detector decreases by 26% and the optical response increases by 22%.