Design of a low-cost nano-manipulator which utilizes a monolithic, spatial compliant mechanism

This paper presents the design of a novel, low-cost nano-manipulator which uses a six-axis compliant mechanism which is driven by electromagnetic actuators. The mechanism's monolithic, planar geometry is easily fabricated via planar manufacturing processes, enables compact packaging and incorporates a flexure mechanism for achieving small transmission ratios. The manipulator tolerates ±1 mm actuator misalignment with less than 0.1% full-scale position error. Measurements over a 100 nm × 100 nm × 100 nm work volume show resolution better than our measurement capability of 5 nm and open-loop parasitic errors less than 5 nm. Measurements over a 100 μm × 100 μm × 100 μm work volume show open loop errors less than 0.2% full-scale. The mechanism's equilateral symmetry and planar geometry make it possible to limit thermal drift in position and orientation to less than 23 nm and 4 μrad over a 30 min start up period. The nano-manipulator, built at US$ 2000 cost (excludes electronics), is used as an ultra-precision fiber optic aligner.