| 用激光散射法非接触在线检测表面粗糙度 |
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| 引用本文： | 邱瑜,秦龚龙,王世华.用激光散射法非接触在线检测表面粗糙度[J].工具技术,2000,34(4):36-38. |
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| 作者姓名： | 邱瑜 秦龚龙 王世华 |
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| 作者单位： | 四川大学,成都610065 |
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| 摘 要： | 介绍了基于光散射原理的激光测量装置非接触在线检测表面粗糙度的测量原理及测量头设计方案。调制光源、双光束、与测量光路同轴的高压喷气流、窄带滤波电路等设计可提高信噪比 ,增强抗干扰能力 ,可实现Ra2～ 1 0 0nm的表面粗糙度在线检测
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| 关 键 词： | 表面粗糙度 在线检测 光散射 半导体激光器 |
Non-contact In-process Measuring Surface Roughness by Laser Scattering Measuring Device |
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| Qiu Yu,et al.Non-contact In-process Measuring Surface Roughness by Laser Scattering Measuring Device[J].Tool Engineering(The Magazine for Cutting & Measuring Engineering),2000,34(4):36-38. |
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| Authors: | Qiu Yu |
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| Affiliation: | Qiu Yu et al |
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| Abstract: | Based on light scattering principle, a laser scattering measuring device for non contact in process measuring surface roughness is developed, and its measuring principle and design scheme are introduced. The modulated light source, double pencil, high pressure jet airflow coaxial with measuring pencil, and narrow band filter circuit are designed to increase the signal to noise ratio and improve anti interference performance. The device can in process measure surface roughness range from R a2nm to R a100nm. |
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| Keywords: | surface roughness in process measurement light scattering laser diode |
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