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用于红外光学窗口的多层保护膜
引用本文:刘士军,李钱陶,熊长新,杨长城.用于红外光学窗口的多层保护膜[J].红外与激光工程,2013,42(1):185-189.
作者姓名:刘士军  李钱陶  熊长新  杨长城
作者单位:1.华中光电技术研究所 武汉光电国家实验室,湖北 武汉 430074
摘    要:采用GexC1-x(碳化锗)、BP(磷化硼)和-Si(非晶硅)作为高折射率材料,DLC(类金刚石)作为低折射率材料,在ZnS(硫化锌)、GaAs(砷化镓)、Ge(锗)等常用红外光学窗口表面研制了用于长波红外(8~12 m)波段的GexC1-x/DLC、BP/DLC及-Si/DLC系列多层保护膜。通过对比试验,研究了多层红外光学窗口保护膜的光学性能、显微硬度及海洋环境适应性。结合红外窗口及膜系材料特性,对试验结果进行了分析讨论。结果表明:GexC1-x/DLC多层红外保护膜具有最佳的光学性能,BP/DLC多层红外保护膜在海洋环境下具有最佳的保护效果。

关 键 词:红外光学窗口    多层保护膜    海洋环境适应性    光学性能
收稿时间:2012-05-11

Multilayer protective coatings for IR optical windows
Liu Shijun,Li Qiantao,Xiong Changxin,Yang Changcheng.Multilayer protective coatings for IR optical windows[J].Infrared and Laser Engineering,2013,42(1):185-189.
Authors:Liu Shijun  Li Qiantao  Xiong Changxin  Yang Changcheng
Affiliation:1.Wuhan National Laboratory for Optoelectronics,Huazhong Institute of Electro-Optics,Wuhan 430074,China
Abstract:By using GexC1-x, BP and -Si as high index material and DLC as low index material, GexC1-x/DLC, BP/DLC and -Si/DLC multilayer protective coatings were designed and coated on long wave band IR windows such as ZnS, GaAs and Ge. Optical performance, micro-hardness and resistance to marine environment of these coatings were studied through experiments. Based on the characteristics of IR window and protective coating material, the results of experiments were discussed. The results show that GexC1-x/DLC multilayer coatings have best optical transmittance and BP/DLC multilayer coatings is best to resist marine environment.
Keywords:
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