| 光热调制激光波长测量物体的微小振动 |
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| 引用本文： | 王学锋,王向朝,钱锋,陈刚,卢洪斌,陈高庭,方祖捷. 光热调制激光波长测量物体的微小振动[J]. 中国激光, 2000, 27(4): 367-371 |
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| 作者姓名： | 王学锋 王向朝 钱锋 陈刚 卢洪斌 陈高庭 方祖捷 |
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| 作者单位： | 中国科学院上海光机所,上海,201800 |
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| 基金项目： | 国家自然科学基金!(69978024)，上海市应用材料研究与发展基金，中国科学院百人计划资助项目 |
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| 摘 要： | 提出了一种新型半导体激光正弦相位调制干涉仪。使用此干涉仪测量了物体的微小振动。利用光热效应调制光源波长降低了光源光强变化引起的测量误差。模拟计算和实验结果证明了此干涉仪的有用性
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| 关 键 词： | 半导体激光器 光热效应 干涉仪 光学检测 纳米测量 |
| 收稿时间： | 1999-09-30 |
Photothermal Modulation of Laser Diode Wavelength for Measuring Microvibrations |
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| Wang Xuefeng,Wang Xiangzhao,Qian Feng,Chen Gang,Lu Hongbin,Chen Gaoting,Fang Zujie. Photothermal Modulation of Laser Diode Wavelength for Measuring Microvibrations[J]. Chinese Journal of Lasers, 2000, 27(4): 367-371 |
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| Authors: | Wang Xuefeng Wang Xiangzhao Qian Feng Chen Gang Lu Hongbin Chen Gaoting Fang Zujie |
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| Abstract: | A novel sinusoidal phase modulating (SPM) laser diode interferometer, which can be used to measure microvibrations with a high accuracy, is reported. In this paper, the photothermal wavelength modulation of a laser diode is employed in SPM interferometer to decrease the measurement errors caused by light intensity changes. The computer simulations and experiments verify the usefulness of the interferometer. |
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| Keywords: | laser diode photothermal effect interferometer optical testing nanometer measurement |
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