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Digital image acquisition in scanning electron microscopy
Authors:H. Le Floch  J.-L. Franceschi  T. Gouraud  P. Launay
Abstract:
Digital image acquisition is of great interest in SEM, as can be proven by the number of ways in which images can be improved by processing with this technique (Desai and Reimer 1985, Hawkes 1981). In the case of the system described here, this interest is enlarged by the facility of storage and retrieval of images. In addition, a digital image becomes the only quantitative result when the “MEBIS” (Microscope Electronique à Balayage In Situ)is used as an automatic control tool whithin an industrial production line (Franceschi and Le Floch 1985). This paper describes a system for acquisition, storage and processing of the images given by “MEBIS”, or other SEM if the scanning system includes a remote command. Software for preliminary processing for local representation is presented. The main advantages of this system are its ease of use and its compactness; it is developed around the familiar and low-cost Apple IIe microcomputer, presented in a portable version including a 5 video screen and a single disk drive in a ruggedized housing.
Keywords:
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