Oxidative annealing of ZnSe/GaAs heterostructures

We annealed ZnSe/GaAs heterostructures in the oxygen atmosphere and investigated structural and optical properties of the forming films using X-ray diffraction and photoluminescence. While highly textured ZnO films were synthesized via low-temperature processing (~ 500 °C), high temperature processing (~ 800 °C) promoted reaction at the film/substrate interface and Zn loss from the film surface resulting in the polycrystalline ZnGa₂O₄ and ZnO₂.