| CdO／SnO2双层薄膜的气敏性能 |
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| 引用本文： | 曾宇平,张天舒.CdO／SnO2双层薄膜的气敏性能[J].功能材料,1994,25(3):251-254. |
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| 作者姓名： | 曾宇平 张天舒 |
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| 作者单位： | 中国科学技术大学材料科学与工程系 |
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| 摘 要： | 以ＣｄＯ、ＳｎＯ＿２粉料作为靶，采用直流溅射方法制得ＣｄＯ、ＳｎＯ＿２双层薄膜元件，比较了ＣｄＯ／ＳｎＯ＿２与ＳｎＯ＿２／ＣｄＯ在性能方面的差异。认为ＣｄＯ／ＳｎＯ＿２的气敏性能较好，并初步探讨了工作温度和膜厚等因素对ＣｄＯ／ＳｎＯ＿２元件的电学性质及气敏特性的影响。
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| 关 键 词： | SnO2 CdO 薄膜 气敏传感器 气敏器件 |
Gas-Sensing Properties of CdO/SnO_2 Bilayer Thin Films |
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| Zeng Yuping,Zhang Tianshu, Shen Yusheng.Gas-Sensing Properties of CdO/SnO_2 Bilayer Thin Films[J].Journal of Functional Materials,1994,25(3):251-254. |
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| Authors: | Zeng Yuping Zhang Tianshu Shen Yusheng |
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| Abstract: | CdO/SnO_2 and SnO_2/CdO bilayerthin films were prepared by d.c.sputtering usingCdO and SnO_2 as targets.Conductance and gas-sensing properties of these bilayer films were measured,and it was found that CdO/SnO_2 bilayerfilms had a better sensitivity to reducing gases compared with that of SnO_2/CdO bilayer films. Effectsof operation temperatures and filrn thickness onconductance and gas-sensing properties of CdO/SnO_2 bilayer films were investigated. |
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| Keywords: | nO_2 CdO thin film gas sensor |
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