| 变角XPS定量分析的研究 |
| |
| 引用本文： | 汪贵华,杨伟毅.变角XPS定量分析的研究[J].真空与低温,1999,5(4):242-245. |
| |
| 作者姓名： | 汪贵华 杨伟毅 |
| |
| 作者单位： | 南京理工大学电子工程与光电技术学院!南京210094 |
| |
| 摘 要： | 综述了变角Ｘ 射线光电子能谱（ＸＰＳ） 分析表面的原理和计算方法，获得了变角ＸＰＳ分析表面／深度的定量计算程序，可快速可靠地计算多层多种组分的含量和层厚度。
|
| 关 键 词： | 变角XPS 层结构 组分 厚度 |
STUDY OF COMPOSITION/DEPTH ANALYSIS TECHNIQUE BY ANGULAR DEPENDENT XPS |
| |
| Wang Guihua,Yang Weiyi,Chang Benkang.STUDY OF COMPOSITION/DEPTH ANALYSIS TECHNIQUE BY ANGULAR DEPENDENT XPS[J].Vacuum and Cryogenics,1999,5(4):242-245. |
| |
| Authors: | Wang Guihua Yang Weiyi Chang Benkang |
| |
| Abstract: | The theory and methods of the composition dependence on depth of surface by angular-dependent X-ray photoelectron spectroscopy(XPS)have been summarized.The quantitative calculating programs were achieved,which could calculate quickly and reliably chemical compositions and layer thickness of multi-layer structure surface. |
| |
| Keywords: | angular-dependent XPS surface layer structure composition thickness |
| 本文献已被 CNKI 维普 等数据库收录！ |
