首页 | 本学科首页   官方微博 | 高级检索  
     

Structures of Diamond-Like Carbon Films
作者姓名:刘东平  陈宝祥  刘艳红
作者单位:[1]Department of Mathematics and Physics, Dalian Nationality University, Dalian 116600,China [2]State Key Laboratory for Material Modification by Laser, Ion and Electron Beams, DalianUniversity of Technology, Dalian 116024, China
摘    要:The structures of diamond-like carbon (DLC) films, including a-C:H, a-C, ta-C:H and ta-C films have been investigated as a random covalent network with a dense film structure. The results show that sp2 C in a-C:H and a-C films tends to form olefinic and aromatic groups while sp^3 C in ta-C:H and ta-C films tends to form single or multiple sixfold groups. The hydrogen atoms in hydrogenated DLC films contribute to stabilizing the carbon skeletal networks. The film structures are well related to their properties such as optical gaps, density and hardness. The results also indicate that the high density and the extreme hardness of ta-C films are attributed to the forming of large sp^3 C bonded sixfold groups.

关 键 词:类金刚石碳  结构  特性  薄膜
收稿时间:2005-08-11
修稿时间:2005-08-11

Structures of Diamond-Like Carbon Films
LIU Dongping, CHEN Baoxiang, LIU Yanhong.Structures of Diamond-Like Carbon Films[J].Plasma Science & Technology,2006,8(3):285-291.
Authors:LIU Dongping  CHEN Baoxiang  LIU Yanhong
Affiliation:LIU Dongping, CHEN Baoxiang, LIU Yanhong( 1. Department of Mathematics and Physics, Dalian Nationality University, Dalian 116600, China; 2. State Key Laboratory for Material Modification by Laser, Ion and Electron Beams, Dalian University of Technology, Dalian 116024, China
Abstract:
Keywords:diamond-like carbon  structure  properties
本文献已被 维普 等数据库收录!
设为首页 | 免责声明 | 关于勤云 | 加入收藏

Copyright©北京勤云科技发展有限公司  京ICP备09084417号