掺铝氧化锌透明导电薄膜的表面织构研究

利用中频直流磁控反应溅射法在玻璃衬底上首先制备了掺铝氧化锌(AZO)透明导电薄膜,然后利用5%的氯化铵(NH4Cl)溶液对制备的AZO薄膜进行表面织构。利用扫描电子显微镜(SEM)、四探针法和分光光度计分别测量并研究了织构前后薄膜的表面形貌、电学和光学特性。研究结果表明NH4Cl水溶液容易控制AZO的表面织构过程,并且可以获得较好的绒面。表面织构后,薄膜在可见光波段的平均反射率从12%降低到7.86%,而电阻率略有增大,该结果和表面织构结果一致。

Surface Textures and Optical Properties of AI-Doped ZnO Films

A novel technique has been developed to texture the surfaces of the transparent,conductive,Al-doped zinc oxide(AZO) films,grown by mid-frequency DC magnetron sputtering on glass substrates.The original work here is to replace diluted hydrochloric acid with 5% aqueous ammonia in surface texturing because its slow etching rate can be easily controlled.The microstructures and optical properties of the AZO films were characterized with X-ray diffraction(XRD),scanning electron microscopy(SEM),ultraviolet visible infrared(UV-VIS-IR) spectroscopy,and four-point probe.The results show that the dilute aqueous ammonia produces good surface texture just as the diluted hydrochloric acid does.And the reflectivity of the textured AZO films is down from 12.7% to 7.86% in the visible light range,indicating the existence of good textures,but its resistivity increases a little.