| 掺钛对类金刚石薄膜力学性能影响研究 |
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| 引用本文： | 赵栋才,肖更竭,任妮,马占吉,武生虎.掺钛对类金刚石薄膜力学性能影响研究[J].真空与低温,2008,14(1):27-31. |
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| 作者姓名： | 赵栋才 肖更竭 任妮 马占吉 武生虎 |
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| 作者单位： | 兰州物理研究所,表面工程技术国家级重点实验室,甘肃,兰州,730000 |
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| 基金项目： | 解放军总装备部预研项目 |
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| 摘 要： | 利用脉冲电弧离子镀技术制备了一系列钛含量不同的类金刚石薄膜。对样品研究发现：随着钛含量的增加（原子百分比小于5．3％），薄膜的硬度和应力都开始下降，且应力的下降幅度大于硬度下降幅度；但当钛含量继续增大时（原子百分比在5．3％和18．0％之间），薄膜的硬度继续保持下降，但薄膜的应力基本保持不变。摩擦系数在钛原子百分比含量小于6．3％时，保持不变，随着钛含量的继续增大，摩擦系数缓慢增加，但当钛含量到达一定值后，其磨损量增加，摩擦系数开始变的不稳定。
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| 关 键 词： | 类金刚石膜 掺钛 应力 硬度 |
| 文章编号： | 1006-7086(2008)01-0027-05 |
| 修稿时间： | 2008年1月23日 |
STUDY ON THE MECHANICAL PRoPERTIES OF DIAMOND LIKE-CARBON FILMS WITH TITANIUM DOPED |
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| ZHAO Dong-cai,XIAO Geng-jie,REN Ni,MA Zhan-ji,WU Sheng-hu.STUDY ON THE MECHANICAL PRoPERTIES OF DIAMOND LIKE-CARBON FILMS WITH TITANIUM DOPED[J].Vacuum and Cryogenics,2008,14(1):27-31. |
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| Authors: | ZHAO Dong-cai XIAO Geng-jie REN Ni MA Zhan-ji WU Sheng-hu |
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| Affiliation: | ( National Key Lab of Surface Engineering, Lanzhou Institute of Physics, Lanzhou 730000, China ) |
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| Abstract: | Samples with different Ti concentration were prepared by using pure Ti target and changing the number of graphite target or using a grid before the Ti target, to adjust Ti concentration in DLC thin films. Studies shown that the hardness and stress keep decreasing with Ti concentration increased （below 5.3 at.% ）. When Ti concentration keep increasing from 5.3 at.% to 18.0 at.%, the hardness keep decreasing, but the stress keep almost constant. The friction coefficient keep constant when the Ti concentration increase from 0 to 6.3 at.%, As the Ti concentration in the thin film keep on increasing, the friction coefficient increase too. |
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| Keywords: | DLC films Ti-doped stress hardness |
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