| 富氮MeNx(Me=Ti,Zr,Hf)薄膜的结构与红外光学性能 |
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| 引用本文： | 许恒志,唐伟忠,于盛旺,胡浩林,惠大圣,吕反修.富氮MeNx(Me=Ti,Zr,Hf)薄膜的结构与红外光学性能[J].功能材料,2011,42(5):785-787,792. |
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| 作者姓名： | 许恒志 唐伟忠 于盛旺 胡浩林 惠大圣 吕反修 |
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| 作者单位： | 北京科技大学材料科学与工程学院,北京,100083 |
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| 摘 要： | 用射频反应磁控溅射方法制备了MeNx(Me=Ti、Zr、Hf)薄膜,研究了在富N2条件下不同的N2/Ar流量比对薄膜结构和光学性能的影响.掠角X射线衍射的分析结果表明,所制得的富氮的TiNx薄膜主要由TiN所组成,而富氮的ZrNx、HfNx薄膜则具有非晶态的结构.用分光光度计和傅里叶红外仪对薄膜的光学透过率的测试表明,...
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| 关 键 词： | 磁控溅射 红外波段 透过率 保护膜 |
Structure and IR optical property of nitrogen-rich MeN_x(Me=Ti,Zr,Hf)films |
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| XU Heng-zhi,TANG Wei-zhong,YU Sheng-wang,HU Hao-lin,HUI Da-sheng,LV Fan-xiu.Structure and IR optical property of nitrogen-rich MeN_x(Me=Ti,Zr,Hf)films[J].Journal of Functional Materials,2011,42(5):785-787,792. |
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| Authors: | XU Heng-zhi TANG Wei-zhong YU Sheng-wang HU Hao-lin HUI Da-sheng LV Fan-xiu |
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| Affiliation: | XU Heng-zhi,TANG Wei-zhong,YU Sheng-wang,HU Hao-lin,HUI Da-sheng,LV Fan-xiu(Shcool of Materials Science and Engineering,University of Science and Technology Beijing,Beijing 100083,China) |
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| Abstract: | MeNx(Me=Ti,Zr,Hf)films have been prepared by using the reactive radio frequency magnetron sputtering technique,and the N2/Ar flow rate ratio of the process has been systematically varied,so that its effects on structure and optical properties of the films could be studied.Results of X-ray diffraction experiments showed that the nitrogen-rich TiNx films are mainly composed of TiN phase,but the nitrogen-rich MeNx(Me=Zr,Hf)films are amorphous in their structure.Optical transmittance of the MeNx(Me=Ti,Zr,Hf)fil... |
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| Keywords: | magnetron sputtering infrared regimes transmittance protective film |
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