| 应用于等离子体显示器的铝电极及其介质层制备研究 |
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| 引用本文： | 刘启发,王艳,汪红,丁桂甫.应用于等离子体显示器的铝电极及其介质层制备研究[J].真空科学与技术学报,2011,31(4):419-423. |
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| 作者姓名： | 刘启发 王艳 汪红 丁桂甫 |
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| 作者单位： | 上海交通大学微纳科学技术研究院微米/纳米加工技术国家级重点实验室薄膜与微细技术教育部重点实验室 上海200240 |
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| 摘 要： | 提出用铝取代银作为寻址电极,氧化铝取代玻璃粉作为其上介质层的新型等离子体显示器(PDP)电极单元,对单项工艺进行了优化,并形成了完整可行的整体工艺路线,有望为PDP生产成本的降低提供一条新的技术途径.选用非连续磁控溅射和光刻-刻蚀工艺制备铝电极,阳极氧化工艺制备氧化铝介质层.用扫描电子显微镜对铝膜、氧化铝介质层及电极单...
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| 关 键 词： | 等离子体显示器 寻址电极 氧化铝介质层 磁控溅射 阳极氧化 |
Growth of Aluminum Electrode and Alumina Dielectric Layer for Plasma Display Panel |
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| Liu Qifa,Wang Yan,Wang Hong,Ding Guifu.Growth of Aluminum Electrode and Alumina Dielectric Layer for Plasma Display Panel[J].JOurnal of Vacuum Science and Technology,2011,31(4):419-423. |
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| Authors: | Liu Qifa Wang Yan Wang Hong Ding Guifu |
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| Affiliation: | Liu Qifa,Wang Yan,Wang Hong,Ding Guifu(Key Laboratory for Thin Film and Microfabrication Technology of Ministry of Education,National Key Laboratory ofMicro/Nano Fabrication Technology,Research Institute of Micro/Nano Science and Technology,Shanghai Jiaotong University,Shanghai 200240,China) |
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| Abstract: | The patterned Al film electrodes and alumina dielectric layers were grown either by magnetron sputtering or by vacuum deposition,followed by anodic oxidation to significantly reduce the cost of silver paints and eutectic glass powder,widely used in fabrication of plasma display panel(PDP).The microstructures of Al film electrode,Al2O3 layers,as well as the morphology of the PDP cells fabricated by lithography,were characterized with scanning electron spectroscopy.The impacts of the growth conditions on micr... |
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| Keywords: | PDP Data electrode Alumina dielectric Magnetron sputtering Anodic oxidation |
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