脑-机接口用微传感器设计与制造方法研究

神经微传感器是脑-机接口系统中的关键器件，通过对神经组织多个区域进行生物电信号记录和施加电刺激，探索神经系统顽疾的治疗方法。建立了神经微传感器与神经组织相互作用的电路模型；从生理、物理、工程等角度出发，设计了微传感器的机械结构，并确定了探针臂的几何参数；将两片二维电极插接在支撑基板上，并安装隔板加以固定，从而组装成三维结构，能在创伤度最小的情况下实现稳定、可靠的三维测点定位。单通道动作电位检测实验证明：此神经微传感器具有良好的神经信号提取能力。

Design and fabrication of micro-sensor for brain-computer interface system

Neural micro-sensor,used for achieving neural recording and stimulation at many locations within the nerve tissue to explore the therapy of neurological diseases,is a critical component of the BCI system.A circuit model of neural signal detection in the process of the interaction between the sensor and the nerve tissue is proposed.The mechanic structure of the micro-sensor is designed based on the consideration of physiology,physics and engineering,and the dimensional parameters of the probe shank are determined.The 3D structure,created by assembling two 2D silicon electrodes onto the supporting silicon platform and held parallel by a silicon spacer,can provide truly stable and reliable 3D positioning of site with minimum trauma.The single-channel test result of action potential indicates that this micro-sensor has a good performance of acquiring neural signals.