| SnO_2纳米晶薄膜栅FET式气敏元件的研制 |
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| 引用本文： | 索辉,向思清,阮圣平,张彤,徐宝琨,王立军.SnO_2纳米晶薄膜栅FET式气敏元件的研制[J].微细加工技术,2000(2). |
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| 作者姓名： | 索辉 向思清 阮圣平 张彤 徐宝琨 王立军 |
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| 基金项目： | 国家自然基金资助项目!(6 9774 0 2 7) |
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| 摘 要： | 利用溶胶 凝胶法合成出纳米晶SnO2 薄膜 ,该薄膜可以利用化学腐蚀方法光刻腐蚀 ,因此采用传统硅平面工艺可以制作出纳米晶SnO2 薄膜栅FET式气敏元件 ,实现了制备纳米晶材料的溶胶 -凝胶工艺与硅平面工艺的兼容。对器件的测试结果表明 ,纳米晶SnO2 薄膜栅FET式气敏元件可以在常温下工作 ,元件的漏电流在乙醇气体中减小 ,掺杂镧以后 ,漏电流变化幅度增大
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| 关 键 词： | 纳米晶薄膜 场效应晶体管 气敏元件 |
Fabrication of SnO_2 nano?crystalline?film gate FET gas sensor |
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| SUO Hui ,XIANG Si?qing ,RUAN Sheng?ping ,ZHANG Tong ,XUBao?kun ,WANG Li?jun.Fabrication of SnO_2 nano?crystalline?film gate FET gas sensor[J].Microfabrication Technology,2000(2). |
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| Authors: | SUO Hui XIANG Si?qing RUAN Sheng?ping ZHANG Tong XUBao?kun WANG Li?jun |
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| Affiliation: | SUO Hui 1,2,XIANG Si?qing 1,RUAN Sheng?ping 1,ZHANG Tong 1,XUBao?kun 1,WANG Li?jun 1 |
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| Abstract: | The SnO 2 nanocrystalline film was synthesized by using Sol?Gel method.The film can be etched with chmical etch techmque.Thus SnO 2 nanocrystalline film gate FET gas sensor could be made by tradional Si planar proxess.The Sol?Gel process is campatible with Si planar process.The measurement results show that the gas sensor can work at room temperature.In ethanol gas it's leaking current decreases |
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| Keywords: | Nano?Crystalline?film FET gas Sensor |
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