| Co90Zr7Ta3三元合金微观组织及磁性能的研究 |
| |
| 引用本文： | 罗俊锋,顾晓倩,徐国进,李勇军,贺昕,熊晓东.Co90Zr7Ta3三元合金微观组织及磁性能的研究[J].稀有金属材料与工程,2021,50(3):1016-1019. |
| |
| 作者姓名： | 罗俊锋 顾晓倩 徐国进 李勇军 贺昕 熊晓东 |
| |
| 作者单位： | 有研亿金新材料有限公司,有研亿金新材料有限公司,有研亿金新材料有限公司,有研亿金新材料有限公司,有研亿金新材料有限公司,有研亿金新材料有限公司 |
| |
| 基金项目： | 国家重点研发计划项目支助项目(项目号2017YFB0305502) |
| |
| 摘 要： | 通过金相组织观察、XRD分析和透磁率检测,研究了Co90Zr7Ta3三元合金微观组织,并通过分析材料组织与透磁率(pass through flux,PTF)变化,得到热机械处理对透磁率的影响。结果表明:真空熔炼制备的Co90Zr7Ta3三元合金有大量枝晶组织,主要包含Co基体和枝晶结构的(Co,Ta)11Zr2。采用轧制及热处理后,合金内部枝晶结构破碎,发生球化。合金中Co基体中的fcc相转变为hcp相,hcp相中(0001)含量的增加提高了靶材透磁率。
|
| 关 键 词： | CoZrTa合金 溅射靶材 热处理 显微组织 透磁率 |
| 收稿时间： | 2020/5/11 0:00:00 |
| 修稿时间： | 2020/6/12 0:00:00 |
Study on Microstructure and magnetic properties of Co90Zr7Ta3 ternary alloy |
| |
| Luo Junfeng,Gu Xiaoqian,Xu Guojin,Li Yongjun,He Xin and Xiong Xiaodong.Study on Microstructure and magnetic properties of Co90Zr7Ta3 ternary alloy[J].Rare Metal Materials and Engineering,2021,50(3):1016-1019. |
| |
| Authors: | Luo Junfeng Gu Xiaoqian Xu Guojin Li Yongjun He Xin and Xiong Xiaodong |
| |
| Affiliation: | Grikin Advanced Materials Co.,Ltd.,Beijing Engineering Research Center of High Purity Metal Sputtering Targets,Grikin Advanced Materials Co.,Ltd.,Beijing Engineering Research Center of High Purity Metal Sputtering Targets,Grikin Advanced Materials Co.,Ltd.,Beijing Engineering Research Center of High Purity Metal Sputtering Targets,Grikin Advanced Materials Co.,Ltd.,Beijing Engineering Research Center of High Purity Metal Sputtering Targets,Grikin Advanced Materials Co.,Ltd.,Beijing Engineering Research Center of High Purity Metal Sputtering Targets,Grikin Advanced Materials Co.,Ltd.,Beijing Engineering Research Center of High Purity Metal Sputtering Targets |
| |
| Abstract: | In this paper, the microstructure of Co90Zr7Ta3 ternary alloy and the effect of microstructure on the PTF (pass through flux) were studied by means of metallographic observation, XRD analysis and PTF measurement. The influence of thermo mechanical treatment on the permeability was obtained by analyzing the structure and PTF of the material. The results show that the ternary alloy of Co90Zr7Ta3 prepared by vacuum melting mainly contains the precipitates of Co matrix and dendrite structure of (Co,Ta)11Zr2. After rolling and heat treatment, the dendrite structure in the alloy was broken to form dispersed precipitates. At the same time, the fcc phase in Co matrix is transformed into hcp phase, and the permeability of the target is improved by increasing the orientation of (0001) in hcp phase. |
| |
| Keywords: | CoZrTa alloy sputtering target heat treatment microstructure PTF |
| 本文献已被 CNKI 维普 等数据库收录！ |
| 点击此处可从《稀有金属材料与工程》浏览原始摘要信息 |
|
点击此处可从《稀有金属材料与工程》下载全文 |
|
