Replication of sub‐micron features using amorphous thermoplastics

A comprehensive experimental study was carried out to replicate sub‐micron features using the injection molding technique. For the experiments, five different plastic materials were selected according to their flow properties. The materials were polycarbonate (PC), styrene‐butadiene block copolymer (SBS), impact modified poly(methyl methacrylate), methyl methacrylate‐acrylonitrile‐butadiene‐styrene polymer (MABS), and cyclic olefin copolymer (COC). Nanofeatures down to 200‐nm line width and with aspect ratios (aspect ratio = depth/width) of 1:1 could be replicated. In all selected materials, the greatest differences between the materials emerged when the aspect ratio increased to 2:1. The most favorable results were obtained with the use of high flow polycarbonate as the molding material. The best replication results were achieved when melt and mold temperatures were higher than normal values.