RM 8111: Development of a Prototype Linewidth Standard |
| |
Authors: | Michael W Cresswell William F Guthrie Ronald G Dixson Richard A Allen Christine E Murabito J V Martinez De Pinillos |
| |
Affiliation: | National Institute of Standards and Technology, Gaithersburg, MD 20899 |
| |
Abstract: | Staffs of the Semiconductor Electronics Division, the Information Technology Laboratory, and the Precision Engineering Laboratory at NIST, have developed a new generation of prototype Single-Crystal CD (Critical Dimension) Reference (SCCDRM) Materials with the designation RM 8111. Their intended use is calibrating metrology instruments that are used in semiconductor manufacturing. Each reference material is configured as a 10 mm × 11 mm silicon test-structure chip that is mounted in a 200 mm silicon carrier wafer. The fabrication of both the chip and the carrier wafer uses the type of lattice-plane-selective etching that is commonly employed in the fabrication of micro electro-mechanical systems devices. The certified CDs of the reference features are determined from Atomic Force Microscope (AFM) measurements that are referenced to high-resolution transmission-electron microscopy images that reveal the cross-section counts of lattice planes having a pitch whose value is traceable to the SI meter. |
| |
Keywords: | AFM calibration CD dimensional standards HRTEM lattice-plane selective etch linewidth metrology SCCDRM reference materials single-crystal silicon traceability uncertainty |
|