Characterization of oxidized gallium droplets on silicon surface: An ellipsoidal droplet shape model for angle resolved X-ray photoelectron spectroscopy analysis |
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Authors: | Jan ?echal Tomáš Matlocha Josef Pol?ák Miroslav Kolíbal Ond?ej Tomanec Radek Kalousek Petr Dub Tomáš Šikola |
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Affiliation: | Institute of Physical Engineering, Faculty of Mechanical Engineering, Brno University of Technology, Technická 2896/2, 616 69 Brno, Czech Republic |
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Abstract: | Deposition and oxidation of metallic gallium droplets on Si(111) were studied by angle resolved X-ray photoelectron spectroscopy. Two gallium peaks - Ga 3d and Ga 2p - were simultaneously measured in order to get an advantage of different inelastic mean free paths of photoelectrons from these two energy levels differing in binding energy by 1100 eV. Together with the angular dependent data it enhances the precision of the size characterization of Ga droplets and oxide thickness determination. A model for the calculation of theoretical intensities based on an ellipsoidal shape of droplets is presented and a simple procedure for estimation of droplet height and actual surface coverage based on measurement on a single emission angle is suggested. |
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Keywords: | X-ray photoelectron spectroscopy XPS Gallium Ga Gallium oxide Ga2O3 Surface structures Models Calculations |
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