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| 基于绝缘液体充填封装RFMEMS开关特性分析 | |
| 引用本文： | 宋明歆,殷景华,郭海.基于绝缘液体充填封装RFMEMS开关特性分析[J].传感器与微系统,2012,31(4):53-55,59. |
| 作者姓名： | 宋明歆 殷景华 郭海 |
| 作者单位： | 1. 哈尔滨理工大学应用科学学院电子科学与技术系,黑龙江哈尔滨,150080 2. 哈尔滨理工大学应用科学学院电子科学与技术系,黑龙江哈尔滨150080;哈尔滨理工大学工程电介质及其应用技术教育部重点实验室,黑龙江哈尔滨150080 3. 哈尔滨理工大学应用科学学院电子科学与技术系,黑龙江哈尔滨150080;大连民族学院计算机科学与工程学院,辽宁大连116600 |
| 基金项目： | 黑龙江省教育厅科学技术研究计划资助项目(12511076) |
| 摘 要： | 提出并设计一种采用绝缘液体充填封装的RF MEMS开关,分析其工作原理,并以高压油、蓖麻油、甘油为绝缘液体充填封装,仿真分析绝缘液体对RF MEMS开关的驱动电压、冲击速度、响应时间、开关电容等方面的影响。结果表明:绝缘液体充填封装有效地将驱动电压降为原来的1/εr,降低上极板对下极板的冲击速度。对3种液态封装材料性能分析,蓖麻油效果最好:阈值电压下降了一半,约为10 V;当驱动电压为20 V时,响应时间为40.6μs,优于高压油(91.3μs)、甘油(89.9μs),冲击速度约为1.26 m/s。 |
| 关 键 词： | 微机电系统 微波开关 封装 |
Performance analysis on RF MEMS switches based on insulating fluid filled applied in packaging |
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| SONG Ming-xin , YIN Jing-hua , GUO Hai.Performance analysis on RF MEMS switches based on insulating fluid filled applied in packaging[J].Transducer and Microsystem Technology,2012,31(4):53-55,59. | |
| Authors: | SONG Ming-xin YIN Jing-hua GUO Hai |
| Affiliation: | 1,3(1.Department of Electrical Science and Technology,School of Appliance Science, Harbin University of Science and Technology,Harbin 150080,China; 2.Key Laboratory of Engineering Dielectrics and Application of Ministry of Education,Harbin University of Science and Technology,Harbin 150080,China; 3.School of Computer Science and Engineering,Dalian Nationalities University,Dalian 116600,China) |
| Abstract: | A new structure of RF MEMS switches which is filled with insulating fluid in packaging is presented and designed and the basic working principle is analyzed.The transformer oil,castor oil and glycerin are used as insulating fluid.The influence of insulating fluid which fills RF MEMS switches on driving voltage,impact speed,response time and on-off capacitance characteristics is discussed by simulation analysis.The results show that the driving voltage is dropped to 1/εr times,the impact speed is effective reduced.Compared with the characteristics of three kinds of insulating fluid,the performances of the castor oil are excellent.The threshold voltage is dropped by half,about 10V.When the driving voltage is 20V,the response time of the castor oil is 40.6 μs which is better than the transformer oil(91.3 μs) and glycerin(89.9 μs),and the impact speed is 1.26m/s. |
| Keywords: | MEMS microwave switches packaging |
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