| 基于LiCl湿敏涂层的QCM湿度传感特性的研究 |
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| 引用本文： | 蒙成,童筱钧,方颀,刘铎. 基于LiCl湿敏涂层的QCM湿度传感特性的研究[J]. 传感器与微系统, 2012, 31(3): 81-84 |
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| 作者姓名： | 蒙成 童筱钧 方颀 刘铎 |
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| 作者单位： | 1. 江南大学物联网工程学院,江苏无锡,214122
2. 江南大学物联网工程学院,江苏无锡214122;南京大学声学研究所近代声学重点实验室,江苏南京210093 |
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| 基金项目： | 近代声学教育部重点实验室基金资助项目(0806) |
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| 摘 要： | 对0.2%质量比LiCl薄膜涂层的QCM湿度传感单元湿敏特性进行了系统性的研究。研究结果表明:0.2%质量比LiCl—QCM的湿度传感单元的线性测量范围为13%～94%RH,克服了常规LiCl湿敏材料传感单元量程窄的缺点。另外,此湿度传感单元还具有重复性好、灵敏度高、湿滞小(小于10 Hz)、数字频率化输出等优点,因而,具有较好的潜在应用前景。
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| 关 键 词： | LiCl 石英晶体微天平 湿敏特性 线性度 重复性 |
Study on humidity sensing characteristics of QCM based on LiCl humidity sensitive coating |
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| MENG Cheng , TONG Xiao-jun , FANG Qi , LIU Duo. Study on humidity sensing characteristics of QCM based on LiCl humidity sensitive coating[J]. Transducer and Microsystem Technology, 2012, 31(3): 81-84 |
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| Authors: | MENG Cheng TONG Xiao-jun FANG Qi LIU Duo |
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| Affiliation: | 1(1.The Internet of Things Institute,Jiangnan University,Wuxi 214122,China; 2.Institute of Acoustics,State Key Laboratory of Modern Acoustics,Nanjing University, Nanjing 210093,China) |
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| Abstract: | Humidity sensing characteristics of quartz crystal microbalance(QCM)humidity sensor coated with LiCl,whose mass ratio is 0.2 %,is studied.The experimental results show that the QCM humidity sensing unit with mass ratio 0.2 % LiCl humidity sensitive coating exhibits broad linear range of 13 % ~94 %RH,high sensitivity,good repeatability,small hysteresis,digital output and nanogram-level measurement precision,and has very attractive prospect of application. |
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| Keywords: | LiC1 quartz crystal microbalance(QCM) humidity sensitive characteristics linearity repeatability |
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