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Universal Block Copolymer Lithography for Metals,Semiconductors, Ceramics,and Polymers |
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| Authors: | Seong‐Jun Jeong Guodong Xia Bong Hoon Kim Dong Ok Shin Se‐Hun Kwon Sang‐Won Kang Sang Ouk Kim |
| Affiliation: | Department of Materials Science and Engineering KAIST Institute for the Nanocentury, KAIST Daejeon 305‐701 (Korea) |
| Abstract: | |
| Keywords: | block copolymers ceramics lithography metals nanopatterning semiconductors |