尺蠖型压电驱动器的闭环控制研究

针对尺蠖型压电驱动器的输出特性，提出利用驱动电压与输出位移分段线性拟合曲线、逐步“搜索”驱动电压值，从而逼近目标位置的闭环控制方法，分析了控制方法的可行性。针对该方法，构建了闭环控制试验系统，对该方法进行了验证，试验结果表明：采用该方法可以实现对尺蠖型压电驱动器的闭环精确控制，相比于开环工作而言定位精度提高了14.4%，该方法具有控制精度较高、响应迅速等优点。

Research on Close-loop control of inchworm-type piezoelectric actuator

According to the output performance of inchworm-type piezoelectric actuator, proposed a novel close-loop control method which was based on the subsection experiential equation between actuating voltage and corresponding stepping motion displacement. Via that method, the control system could search for the optimal actuating voltage step by step so as to approach target position. Carried on experiment to the closed-loop system of the inchworm-type piezoelectric rotary actuator. The experimental results showed that the novel method could control the actuator for precision positioning in closed-loop mode, and the position precision was improved by 14.4% compared to the open-loop working mode. The control method had the advantages of high accuracy, quick response and et al.