微系统热管理技术的新发展

多功能高度集成的微系统技术对信息系统的通信、传感、处理和执行等方面产生了很大的影响，而热管理问题却一直制约着微系统技术的发展。该文介绍了美国在微系统热管理技术方面的项目研究计划及基于热传导与液冷技术的微系统热管理技术的新进展，提出了一种基于压电驱动的主动微系统高效热管理方法，并通过搭建试验样机完成原理性测试验证。该技术主要针对如微波毫米波大功率“瓦片式”T/R（收发）组件等射频微系统热管理应用。

New Development of Thermal Management Technology for Microsystems

The highly integrated multifunctional microsystem technology has made a great impact on communication, sensing, processing and actuating of information systems. However, the thermal management issues of microsystems restrict its further development. This paper presents the initiatives of America''s thermal management for microsystems and reviews the advances of thermal management technology for microsystems based on heat conduction and liquid cooling techniques. An active and efficient thermal management method for microsystems based on piezoelectric actuation is also presented in this paper, and the principle test verification has been implemented by setting up the test prototype. The proposed technology can be applied to the thermal management of RF microsystems such as microwave/millimeter wave tile T/R module with high power.