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On the relationship between yield and cycle time in semiconductorwafer fabrication |
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| Authors: | Wein L.M. |
| Affiliation: | Sloan Sch. of Manage., MIT, Cambridge, CA; |
| Abstract: | The author derives a relationship between the mean amount of time wafers spend in the fab and the mean production rate of nondefective die, assuming the number of defects per die is a Poisson random variable whose mean varies linearly with the amount of time the wafer spends in the fab |
| Keywords: | |