Design of a pilot-scale microwave heated chemical vapor infiltration plant: An innovative approach

A hybrid Microwave-assisted Chemical Vapor Infiltration (MW-CVI) pilot plant to produce silicon carbide-based Ceramic Matrix Composites was designed, built and setup, as a part of the European project HELM. Being different from the existing lab-scale MW-CVI equipment, this pilot plant was designed with the idea of a further industrial scale-up.In order to enable the infiltration of the large samples of interest in industrial applications, the reactor was designed with the internal microwave cavity acting as an overmoded resonator at the frequencies of interest. The designed pilot plant allowed proper microwave heating of cylindrical samples of diameter doubled with respect to typical lab-scale preforms, with reproducible operating conditions in terms of transmitted/reflected power. First infiltration trials resulted in an average reaction efficiency of 25 % with the desired inside-out silicon carbide infiltration. The main steps of the design and the results of the first infiltration tests are discussed in this paper.