小型的高精度软X射线-极紫外反射率计

针对探月二期工程中的有效载荷之一极紫外相机中的多层膜光学元件高精度反射率测量的需要，建立了一台使用液体靶激光等离子体光源的小型软X射线-极紫外波段反射率计。该反射率计主要由激光等离子体光源、Mcpherson 247动狭缝掠入射单色仪及相关的数据采集系统组成。单色仪波段范围1-125nm，光谱分辨率小于0.08nm。无碎屑的液体靶激光等离子体光源的使用避免了光学元件的损坏，而动狭缝掠入射单色仪的使用则提高了光谱分辨率和波段范围。使用该反射率计实测了工作波长为13.5nm和30.4nm的Mo/Si多层膜的反射率，测量结果表明测量重复性优于±0.5%。

Compact high-precision soft X-ray and extreme ultraviolet reflectometer

A compact soft x-ray and extreme ultraviolet （EUV）reflectometer system using a laser produced-plasma (LPP) light source with liquid-jet target have been built based on the requirement on high-precision reflectance measurement of multilayer mirrors for use in an EUV imager which is a payload of CHANGE plan. This reflectometer is mainly composed of a LPP light source, Mcpherson 247 type grazing-incidence monochromator with moving exit slit and correlative data collection system. The monochromator have 1-125nm wavelength range and less than 0.08nm spectral resolution. In comparison with metal target LPP source, the usage of debris-free liquid-jet target LPP source avoid destroying optical elements near the light source, while the use of grazing-incidence monochromator with moving exit slit improve both wavelength range and spectral resolution. At the same time the measurement results of Mo/Si multilayer coatings reflectance with central wavelength 13.5nm and 30.4nm also are given. The curves of reflectance Vs. wavelength of Mo/Si multilayer coatings show the repeatability of the reflectance measurement is better than ±0.5%.