| Abstract: | A new pixel structure for the realization of a 1‐μm‐pixel‐pitch display was developed. This structure, named vertically stacked thin‐film transistor (VST), was based on the conventional back‐channel etched thin‐film transistor (TFT), but all the layers except the horizontal gate line were vertically stacked on the embedded data line, enabling the implementation of high‐resolution display panels. The VST device with a channel length of 1 μm showed a high field effect mobility of more than 50 cm2/Vs and low subthreshold slope of 78 mV per decade. It also shows a high uniform electrical characteristic over the entire 6‐in. wafer. The development of a new pixel architecture is expected to enable the implementation of 1‐μm‐pixel‐pitch high‐resolution displays such as spatial light modulators for digital holograms. |
