微机械陀螺的仿真与优化

微机械陀螺依靠振动模态频率来测量旋转角速度,通常微机械结构的振动模态相当复杂。虽然已有很多文章研究了如何调节驱动模态和敏感模态以获得最大的敏感度,却很少有人分析微机械陀螺的振动模态。振动模态与陀螺结构的设计参数有极大的关系,这些参数包括陀螺检测质量的尺寸、支撑系统的类型和尺寸,以及用以制造陀螺主体的多晶硅的残余应力。研究了一个静电驱动、电容检测、敏感垂直轴角速度的陀螺(也称平面陀螺)。同时,用有限元法分析法对微机械陀螺的结构进行了分析。

Simulation and optimization of micromachined gyroscope

Micromachined gyroscopes rely on tuned vibration mode frequencies to measure rotation rates and typically have complex modes of vibration for the mechanical microstructures.Although there are many reports on how to exactly tune the drive and sense modes of vibration to maximize sensitivity of micromachined gyroscope,there are only few reports on the analysis of modes of vibration.Modes of vibration are strongly dependent on the design parameters of the mechanical structure of the gyroscope including the dimension of the proof mass,types and dimensions of the suspension,and residual mechanical stress of the high aspect-ratio polysilicon film used to form the microstructures of the micromachined gyroscope.An electrostatic drive and capacitive sense in-plane decoupled gyroscope for measuring vertical angular velocity is proposed.Micromachined gyroscope microstructure is annlyzed by finite-element analysis (FEA) simulation.