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Fabrication of microfluidic structures in quartz via micro machining technologies |
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| Authors: | Lin Ying-Chieh Lee Chung-Ching Lin Heng-Sheng Hong Zheng-Han Hsu Fu-Chuan Hung Tsung-Pin Lyu Yu-Ting | |
| Affiliation: | 1.Department of Mold and Die Engineering, National Kaohsiung University of Applied Sciences, Kaohsiung, 807, Taiwan ;2.Mold and Precision Machining Technology Section, Micro/Meso Mechanical Manufacturing R&D Department, Metal Industries Research and Development Centre (MIRDC), Kaohsiung, Taiwan ; |
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| Abstract: | Microfluidic channels have been created for quartz material using micromechanical manufacturing technologies such as micro laser machining, micro ultrasonic machining, and ultra-precision machining. Ultra-precision machining has been used to manufacture cross-junction channels 14 µm wide and 28 µm deep with a three-dimensional triangle cross-section. Micro laser machining has been used to manufacture U-shaped and | |
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