Dynamics and vibrations of particle-sensing MEMS considering thermal and electrostatic actuation |
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| Authors: | Siahpour Shahin Zand Mahdi Moghimi Mousavi Mohammad |
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| Affiliation: | 1.School of Mechanical Engineering, College of Engineering, University of Tehran, North Kargar Street, Tehran, Iran
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| Abstract: | Microsystem Technologies - The dynamic behavior of micro-cantilevers and micro-bridges under electrostatic and thermal base actuations is investigated in this paper. To solve the equation... |
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