Paired-wire carrying current actuators and piezoelectric beam sensors for microelectromechanical systems |
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| Authors: | Zamani Kouhpanji Mohammad Reza |
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| Affiliation: | 1.Center for High Technology Materials, Electrical and Computer Engineering Department, Mechanical Engineering Department, University of New Mexico, Albuquerque, 87131, USA
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| Abstract: | Microsystem Technologies - An alternative actuator for MEMS/NEMS device is proposed and analyzed. The actuator is based on the paired-wires (PW) carrying current concept, which makes the actuator... |
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