| 一种新型的电热驱动MEMS微继电器的研制 |
| |
| 引用本文： | 胡志军,陈迪,黄闯,陈翔,朱军,刘景全.一种新型的电热驱动MEMS微继电器的研制[J].传感技术学报,2009,22(12). |
| |
| 作者姓名： | 胡志军 陈迪 黄闯 陈翔 朱军 刘景全 |
| |
| 作者单位： | 上海交通大学微纳科学技术研究院,微米/纳米加工技术国家级重点实验室,薄膜与微细技术教育部重点实验室,上海,200240 |
| |
| 基金项目： | 国家自然科学基金资助 |
| |
| 摘 要： | 设计和制备了一种新型的电热驱动微电子机械(MEMS)继电器,并进行了性能测试.整个工艺采用非硅MEMS工艺,利用Cu作为牺牲层材料,Ni作为微继电器的结构材料.微继电器是基于杠杆放大原理设计的,因此能够获得较大的行程;驱动臂采用"U"型梁设计,能够在不增加功耗的条件下,获得较大的驱动力.并采用Ansys10.0有限元软件对微继电器进行了模拟分析.测试结果表明,这种微型继电器具有体积小、驱动电压低、切换速度快等优点.
|
| 关 键 词： | 微继电器 电热驱动 有限元分析 |
Development of a novel electric-thermal-driven MEMS micro-relay |
| |
| HU Zhijun,CHEN Di,HUANG Chuang,CHEN Xiang,ZHU Jun,LIU Jingquan.Development of a novel electric-thermal-driven MEMS micro-relay[J].Journal of Transduction Technology,2009,22(12). |
| |
| Authors: | HU Zhijun CHEN Di HUANG Chuang CHEN Xiang ZHU Jun LIU Jingquan |
| |
| Affiliation: | HU Zhijun,CHEN Di,HUANG Chuang,CHEN Xiang,ZHU Jun,LIU Jingquan National Key Laboratory of Nano/ Micro Fabrication Technology,Key Lab for Thin Film , Micro-fabrication of Ministry of Education,Research Institute of Micro/ Nano Science , Technology,Shanghai Jiao Tong Univ.,Shanghai 200240,China |
| |
| Abstract: | A novel electric-thermal-driven micro-electronic-mechanical(MEMS)relay was developed,and the performance test was carried out.The non-silicon MEMS fabrication process was used,Cu as sacrifice material and Ni as structural material.The micro-relay can obtain larger travel,which is based on the principle of leverage.The driving arm,utilizing U shape-beam design,can produce larger driving force by small power.Ansys10.0 finite element analysis software was used to simulate and analyze.Testing result shows that ... |
| |
| Keywords: | MEMS MEMS micro-relay electric-thermal driven finite element analysis |
| 本文献已被 CNKI 万方数据 等数据库收录！ |
| 点击此处可从《传感技术学报》浏览原始摘要信息 |
|
点击此处可从《传感技术学报》下载全文 |
|
