| 一种用于微器件装配的系统设计与研制 |
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| 引用本文： | 段瑞玲,李玉和,李庆祥,巩娟.一种用于微器件装配的系统设计与研制[J].新技术新工艺,2006(5):30-33. |
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| 作者姓名： | 段瑞玲 李玉和 李庆祥 巩娟 |
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| 作者单位： | 清华大学精密仪器系,100084 |
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| 基金项目： | 国家重点基础研究发展计划(973计划) |
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| 摘 要： | 首先概述了国内外微装配系统的研究现状,在分析微装配系统的特点和功能需求基础上,提出一种基于计算机视觉伺服控制的微装配系统设计方案,详细描述了系统中精密三维微定位工作台、SMA微夹持作业工具以及视觉伺服控制系统等关键技术的解决方案,并以直径为几百微米级的典型微轴孔的装配为目标开展各项关键技术的试验研究.
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| 关 键 词： | 微装配 视觉控制 精密微动工作台 |
Design and Development of a Micro-assembly System |
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| Duan RuiLing;Li YuHe;Li QingXiang;Gong Juan.Design and Development of a Micro-assembly System[J].New Technology & New Process,2006(5):30-33. |
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| Authors: | Duan RuiLing;Li YuHe;Li QingXiang;Gong Juan |
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| Abstract: | The present status of the micro assembly system is presented firstly in the paper. According to analyze the features of micro-assembly system and its function, a new micro assembly system based on computer micro-visual servo feedback control was presented. The key techniques, such as the design of a novel a-DOF micro- positioning worktable, SMA micro-gripper and the visual servo system, are described in detail. The assembly experiments of several hundred microns levels micro axis holes was made. The results show that the new system is useful in micro-assembly of typical micro-parts. |
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| Keywords: | MEMS |
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