电容式微加速度传感器微结构的拓扑优化

采用均匀化方法,以电容式微加速度传感器微结构的第一阶谐振频率为目标函数,以微结构的体积作为约束条件,建立了微结构的拓扑优化模型,对叉指式微加速度传感器微结构进行了拓扑优化设计,经计算获得满足体积约束并使第一阶谐振频率最大的微结构拓扑形式。计算结果表明该方法可以很好地解决微加速度传感器灵敏度和谐振频率这一对矛盾,在满足灵敏度的要求下提高微加速度传感器的测量范围上限,不失为一种先进的、有效的电容式微加速度传感器微结构的设计方法。

Microstructure topology optimization of capacitive micro- machine accelerometer

By adopting the homogenization method and using the first resonance frequency of capacitive micro-machine accelerometer microstructure as object function and the volume as the constrained condition. Topology optimization model of microstructure is established. The topology optimization for the microstructure of comb accelerometer is made. After computing the microstructure topology is achieved which satisfies the volume constraint and makes the first resonance frequency of the microstructure maximal. The computing result indicates the method can resolve the contradiction between the sensitivity and the resonance frequency of the micro -machine accelerometer and increase the upper limit of measurement range and not decrease the sensitivity. It is an advanced, effective design method for the microstructure of capacitive micro-machine accelerometer.