电子显微镜的现状与展望

本文扼要介绍了电子显微镜的现状与展望，透射电子显微镜方面主要有：高分辨电子显微学及原子像的观察，像差校正电子显微镜，原子尺度电子全息学，表面的高分辨电子显微正面成像，超高压电子显微镜，中等电压电镜，１２０ｋＶ，１００ｋＶ分析电镜，场发射枪扫描透射电镜及能量选择电镜等，透射电镜将又一次面临新的重大突破，扫描电子显微镜方面主要有：分析扫描电镜和Ｘ射线能谱仪，Ｘ射线波谱仪和电子探针仪，场发射枪扫描电镜和

State and Prospects of Electron Microscopes

The state and prospects of electronmicroscopes were described shortly in this paper.For transmission electronmicroscope(TEM),there arehigh resolution electron microscope(HREM) and imaging of atomicstructure,aberration corrected transmission electron microscope,electron holography atatomic dimensions,HREM plan-view imaging of surface structure,ultrahigh voltagetransmission electron microscope,mid-voltage transmission electron microscope,120kV and100kV analytical electron microscope,field emission scanning transmission electronmicroscpe(FE-STEM),energy-filtering transmission electron microscope(EF-TEM),there will bea new break through for TEM in the near future;for scanning electronmicroscope(SEM)analytical scanning electron microscope and energy dispersive X-Rayspectrometer(EDS),wavelength dispersive X-Ray spectrometer(WDS) and electron probemicroanalyzer(EPMA),field emission scanning electron microscope(FE-SEM) and low voltagescanning electron microscope,ultra large specimen chamber scanning electronmicroscope,environmental scanning electron microscope(ESEM),scanning electron-acousticmicroscope(SEAM),defect review(critical dimension measurement)scanning electronmicroscope(CD-SEM),orientation imaging microscopy,computer-controlled scanning electronmicroscope(PC-SEM),and it would seem that the inherent limit of secondary electronresolution could be at about 0.2 to 0.3nm and be good enough to permit atomic imaging.