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| InGaAsP／InP异质结构材料X射线衍射摇摆曲线中的干涉指纹研究 | |
| 引用本文： | 丁国庆 魏铭鉴. InGaAsP／InP异质结构材料X射线衍射摇摆曲线中的干涉指纹研究[J]. 光通信研究, 1995, 0(2): 30-34 |
| 作者姓名： | 丁国庆 魏铭鉴 |
| 作者单位： | 武汉电信器件公司，武汉工业大学，武汉纺织工学院 |
| 摘 要： | 双晶衍射摇摆曲线的全面分析需用计算机模拟高木方程能得到，其信息广但不直观。本文讨论了ＭＯＣＶＤ外延片Ｘ射线衍射中的干涉指纹，指出了用干涉指纹测试簿膜厚度的精确性，讨论了干涉指纹出现的一些特征，使能直观地得到一些外延片的结构信息，为识别和正确使用干涉指纹估算簿层厚度提供依据。 |
| 关 键 词： | 摇摆曲线 干涉指纹 化合物半导体 X射线衍射 |
The Interference Fringes of X-Ray Diffraction Rocking Curves from InGaAsP/InP Heteroepitaxy Materials |
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| Ding Guoqing, Wi Minjian et al.. The Interference Fringes of X-Ray Diffraction Rocking Curves from InGaAsP/InP Heteroepitaxy Materials[J]. Study on Optical Communications, 1995, 0(2): 30-34 | |
| Authors: | Ding Guoqing Wi Minjian et al. |
| Affiliation: | Ding Guoqing; Wi Minjian et al. |
| Abstract: | In this paper,the interference fringes of X-ray diffraction rocking curves from MOCVD epitaxial chips are discussed. They show the accuracy of measured thickness using the interference fringes method. The various characteristics of the interference fringes are also discussed in order to get some structure knowledges from the epitaxial chips by human eyes. It will be convenient to discriminate and use correctly the interference fringes. |
| Keywords: | Rocking curves Interference fringes |
| 本文献已被 CNKI 维普 等数据库收录！ | |