Chemical vapor deposition of pyrolytic boron nitride ceramics from single source precursor |
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| Affiliation: | 1. Department of Radiology, Memorial Sloan Kettering Cancer Center, 1275 York Avenue, New York, NY 10065, United States;2. Department of Medical Physics, Memorial Sloan Kettering Cancer Center, 1275 York Avenue, New York, NY 10065, United States;3. Department of Diagnostic Radiology, American University of Beirut Medical Center, Riad El-Solh, 1107 2020 Beirut, Lebanon;1. MOE Key Laboratory of Resources and Environmental System Optimization, College of Environmental Science and Engineering, North China Electric Power University, Beijing, 102206, China;2. Laboratory of Environmental Remediation and Functional Material, Suzhou Research Academy of North China Electric Power University, Suzhou, Jiangsu, 215213, China;1. Department of Physics, Bal?kesir University, 10145, Bal?kesir, Turkey;2. Department of Physics, Uludag? University, 16059, Bursa, Turkey |
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| Abstract: | Pyrolytic boron nitride ceramics were prepared on graphite substrates from borazine as the single source precursor by hot-wall chemical vapor deposition in deposition temperature range from 1300 °C to 1600 °C with a total pressure of 200 Pa. The chemical composition and the effect of deposition temperature on the morphology, phase, and structure of the pyrolytic boron nitride were investigated. A high purity product with stoichiometric B/N ratio is obtained. The deposition surface of the product exhibited a pebble-like structure, and the fracture surface showed an apparent laminar structure having a preferential (002) orientation parallel to the surface of the substrate at temperatures above 1400 °C. The product contained some turbostratic and amorphous boron nitride as evidenced from XRD and FTIR examinations. With the increase of deposition temperature, the crystallinity of the pyrolytic boron nitride increased with the turbostratic and amorphous boron nitride turned into hexagonal structure, and the crystallinity of the product became higher. |
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| Keywords: | Pyrolytic boron nitride Chemical vapor deposition Borazine |
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